Abstract—Electrical Discharge/Spark Machining
(EDM/ESM) is an advanced machining process that has various
applications in macro and micro fabrication. Advantages and
intrinsic potentials of the process is promising application of
this process in nanofabrication. The spark nanomachining is a
precise, sensitive and costly process. Therefore, simulation of
nano-hole produced by each spark in this process prevents
spending extra time and cost to perform spark nanomachining
process through trial and error method. In this paper nano-hole
machined by the spark nanomachining process on a gold
nano-film is simulated under practically experimental
conditions. Radius, depth and volume of the nano-hole are
evaluated versus process conditions. It is observed that radius of
the nano-hole is increased exponentially with increasing spark
pulse duration. Also, depth, volume of the removed material
from the workpiece surface and material removal rate (MRR)
are increased with increasing consumed energy by each spark.
Index Terms—Electro spark / discharge machining, ESM,
EDM, electro spark nanomachining, simulation
Gh. Tahmasebi Pour is with the Faculty of New Sciences and
Technologies, University of Tehran, Tehran, Iran (e-mail: tahmasebipour@
ut.ac.ir).
Y. Tahmasebi Pour and M. Ghoreishi are with the Faculty of Mechanical
Engineering, K.N. Toosi University of Technology, Tehran, Iran (e-mail:
lm-tahmasebipour@araku.ac.ir, e-mail: ghoreishi@kntu.ac.ir).
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Cite:Gh. Tahmasebi Pour, Y. Tahmasebi Pour, and M. Ghoreishi, "Electro-Spark Nanomachining Process Simulation," International Journal of Materials, Mechanics and Manufacturing vol. 2, no. 1, pp. 32-35, 2014.
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