Abstract—Gauge Repeatability and Reproducibility (G.R.R.) is one part of Measurement System Analysis (MSA), which is to appraise the variability of measurement system. There are three methods to evaluate G.R.R.: Range, Average-Range and ANOVA. Range method is only to approximately evaluate measurement variability but cannot estimate the contribution of repeatability and reproducibility. So, it’s not applicable in IC manufacturing. In this paper, we studied and analyzed the difference between Average-Range and ANOVA in G.R.R. evaluation by using IC manufacturing data.
Index Terms—G.R.R., average-range, ANOVA, NDC, IC manufacturing.
All authors are with the Corp. Quality and Reliability Engineering unit, Semiconductor Manufacturing International Corporation, Shanghai, China (e-mail: Salus_Zhou@smics.com, Kevin_Gong@smics.com, Lisa_Yu@smics.com, Kary_Chien@smics.com).
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Cite: Yan-Ju Yu, Yuan Zhou, Tai-Cheng Gong, and Wei-Ting Chien, "G.R.R. Evaluation and Application in IC Manufacturing," International Journal of Materials, Mechanics and Manufacturing vol. 4, no. 4, pp. 278-281, 2016.
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