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General Information
    • ISSN: 1793-8198
    • Frequency: Quarterly
    • DOI: 10.18178/IJMMM
    • Editor-in-Chief: Prof. K. M. Gupta, Prof. Ian McAndrew
    • Executive Editor: Ms. Cherry L. Chen
    • Abstracting/Indexing: EI (INSPEC, IET), Chemical Abstracts Services (CAS),  ProQuest, Crossref, Ulrich's Periodicals Directory,  etc.
    • E-mail ijmmm@ejournal.net
Editor-in-chief
Prof. Ian McAndrew
Embry Riddle Aeronautical University, UK.
It is my honor to be the editor-in-chief of IJMMM. I will do my best to help develop this journal better.

IJMMM 2016 Vol.4(4): 278-281 ISSN: 1793-8198
DOI: 10.18178/ijmmm.2016.4.4.271

G.R.R. Evaluation and Application in IC Manufacturing

Yan-Ju Yu, Yuan Zhou, Tai-Cheng Gong, and Wei-Ting Chien
Abstract—Gauge Repeatability and Reproducibility (G.R.R.) is one part of Measurement System Analysis (MSA), which is to appraise the variability of measurement system. There are three methods to evaluate G.R.R.: Range, Average-Range and ANOVA. Range method is only to approximately evaluate measurement variability but cannot estimate the contribution of repeatability and reproducibility. So, it’s not applicable in IC manufacturing. In this paper, we studied and analyzed the difference between Average-Range and ANOVA in G.R.R. evaluation by using IC manufacturing data.

Index Terms—G.R.R., average-range, ANOVA, NDC, IC manufacturing.

All authors are with the Corp. Quality and Reliability Engineering unit, Semiconductor Manufacturing International Corporation, Shanghai, China (e-mail: Salus_Zhou@smics.com, Kevin_Gong@smics.com, Lisa_Yu@smics.com, Kary_Chien@smics.com).

[PDF]

Cite: Yan-Ju Yu, Yuan Zhou, Tai-Cheng Gong, and Wei-Ting Chien, "G.R.R. Evaluation and Application in IC Manufacturing," International Journal of Materials, Mechanics and Manufacturing vol. 4, no. 4, pp. 278-281, 2016.

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