Abstract—Capacitive mode methanol sensing performance of ZnO hexagonal nanorods based MIS devices having diameters of 40-60 nm and lengths of 460-480 nm, is reported in this paper. ZnO nanorods were synthesized on p-Si substrate by chemical bath deposition method (CBD) using 50 ml aqueous solution of Zinc acetate dihydrate and HMT. The as deposited sensor with Pd catalytic contact in metal-insulator-metal (MIS) configuration offered 99% response magnitude (RM) in the temperature range of (300-325) ºC towards 700 ppm methanol concentration. The response time (Rs:140s) and recovery time (Rc:110s) of the methanol sensor at 325ºC were also obtained. The sensor was able to detect methanol even down to 10 ppm.
Index Terms—Capacitive sensor, CBD, ZnO hexagonal nanorods, methanol sensing.
N. Banerjee, K. Dutta, and P.Bhattacharyya are with the Department of Electronics and Telecommunication Engineering, Indian Institute of Engineering Science & Technology, Shibpur, India (Tel.: +919038370727; e-mail: nabaneeta2007@gmail.com).
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Cite: N. Banerjee, K. Dutta, H. Misra and P. Bhattacharyya, "Capacitive Mode Methanol Sensing by ZnO Nanorods Based Devices," International Journal of Materials, Mechanics and Manufacturing vol. 5, no. 2, pp. 92-95, 2017.
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